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A Microchip Optomechanical Accelerometer

Patent AbstractTechnologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-cavity to measure the displacement of an integrated test mass generated by acceleration...

Published: 5/23/2023 | Inventor(s): Oskar Painter, Martin Winger, Qiang Lin, Alexander Krause, Tim Blasius

Keywords(s):

Category(s): Optics, Nanotechnology