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A Microchip Optomechanical Accelerometer
Patent AbstractTechnologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-cavity to measure the displacement of an integrated test mass generated by acceleration...
Published: 10/25/2019   |   Inventor(s): Oskar Painter, Martin Winger, Qiang Lin, Alexander Krause, Tim Blasius
Keywords(s):  
Category(s): Optics, Nanotechnology