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A Microchip Optomechanical Accelerometer
Patent AbstractTechnologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-cavity to measure the displacement of an integrated test mass generated by acceleration...
Published: 5/7/2024
|
Inventor(s):
Oskar Painter
,
Martin Winger
,
Qiang Lin
,
Alexander Krause
,
Tim Blasius
Keywords(s):
Category(s):
Optics
,
Nanotechnology