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Balanced, Periodic Error Free, Three Degree of Freedom Interferometer
Technology SummaryThis interferometric technology is able to measure tip/tilt and global displacement of a small target mirror (a few mm^2) using only one optical beam. Other interferometric systems require a much larger footprint on the target to measure a single axis of displacement. This means that to measure displacement, tip, and tilt, three identical...
Published: 10/25/2019   |   Inventor(s): Jonathan Ellis, Josephus Spronck
Keywords(s):  
Category(s): Optics