Search Results - thomas+brown

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Camera-Based Testing of Photonic Integrated Circuits
The invention is in the area of non-contact testing of photonic integrated circuits. The state of the art in photonic circuit testing requires either cumbersome probes or requires fibers to be aligned to coupling locations at the edge of the die. It has been well known for some time that a sensitive microscope camera combination can detect even weakly...
Published: 3/29/2021   |   Inventor(s): Thomas Brown, Debra Saulnier
Keywords(s):  
Category(s): Optics
Focused Beam Scatterometry For Semiconductor Metrology
The capacity to measure nanoscale features rapidly and accurately is of central importance for the monitoring of manufacturing processes in the production of computer integrated circuits. It is known that far-field scattered light requires a priori sample information in order to reconstruct nanoscale information such as is required in semiconductor...
Published: 11/14/2019   |   Inventor(s): Miguel Alonso Gonzalez, Stephen Head, Michael Theisen, Thomas Brown
Keywords(s):  
Category(s): Nanotechnology, Optics