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Optomechanical Disk Vibratory Gyroscopes
Patent AbstractAn integrated optomechanical disk vibratory gyroscope device includes a mechanical oscillator having a substantially circular structure. The substantially circular structure is supported by a pillar, and mechanically isolated from a surrounding structure by a gap or slot. One or more actuators are coupled to the mechanical oscillator...
Published: 5/7/2024
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Inventor(s):
Qiang Lin
,
Jonathan Yi Ho Lee
,
Oskar Painter
Keywords(s):
Category(s):
Optics
,
Nanotechnology