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Optomechanical Disk Vibratory Gyroscopes
Patent AbstractAn integrated optomechanical disk vibratory gyroscope device includes a mechanical oscillator having a substantially circular structure. The substantially circular structure is supported by a pillar, and mechanically isolated from a surrounding structure by a gap or slot. One or more actuators are coupled to the mechanical oscillator...
Published: 10/25/2019   |   Inventor(s): Qiang Lin, Jonathan Yi Ho Lee, Oskar Painter
Category(s): Optics, Nanotechnology